Item # Pura Plus, Pura Plus Dew-Point Transmitters on Michell Instruments, Inc. Michell Instruments, Inc. - Item # Pura Plus, Pura Plus Dew-Point Transmitters
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Pura Plus Dew-Point Transmitters
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The new Pura Plus is Michell Instruments' response to latest changes in the wafer fabrication industry requirements for device size and specification. The Pura Plus is an on-line trace moisture event sensor designed for UHP inert gas applications in semiconductor fabs to allow installation at multiple locations at the final point of entry to the process tool. In the complex distribution system of a fab, involving many branches, joints and points of use, moisture ingress often takes place downstream of the conventional moisture monitoring point through small leaks, insufficient system design, component failure or via a procedural failure. Installed in the distribution system the Pura Plus provides rapid indication (less than 1 minute) of a moisture event as small as 20 ppb at 1 ppb baseline.

Pura Plus Dew-Point Transmitters

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Pura Plus Dew-Point Transmitters-2

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Specifications · Materials Exposed to Gas

Specifications

Response Speed

< 1 minute for a 20 ppb moisture event in 1 ppb base

Moisture Range

1 ppb to 20,000 ppm

Pressure Range

0 to 10 barg
0 to 145 psig

Leak Tested to

0 to 9 mbar ls-1
0 to 0.13 psig

Operating Flow Range

1 to 10 lmin-1
2.1 to 21.1 scfh

Operating Temperature

+5 to +40 ºC
+41 to +104 ºF

Storage Temperature

+30 to +70 ºC
+86 to +158 ºF

Power Supply

20 to 28 VDC

Maximum Power Consumption

5 W

Fuse Rating for Any External Fuse

500 mA Quickblow

Data Output

Modbus ASCII on 2-wire RS-485

Warning and Alarm Outputs

2 open-collector transistors

Maximum Voltage

40 VDC

Maximum Current

100 mA

Materials Exposed to Gas

Housing Material

Stainless steel AISI316L VAE, electropolished < 10 Ra surface finish

Sensor Construction

Aluminum oxide dielectric, gold upper plate, aluminum lower plate

Internal Volume

4.4 cm³
0.27 in³

Weight

450 g
1 lb

Gas Connections

1/4" male VCR

Electrical Connections

9-pin D-type male connector

Electro-magnetic Compatibility

EN50081-2 and EN50082-2

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